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HYOSUNG Neochem

Providing material solutions according to semiconductor and display technology trends

Following the technology roadmap of semiconductor and display customers, laboratories, sales, and production organizations are organically working together to provide solutions to materials on a preferential basis.

Establishment of various product portfolios and a stable supply chain

As a global supplier of specialty gases, we provide various products and build a stable supply system by diversifying production bases.

Development of
specialty gases based on excellent technology

With exclusive technology development and continuous research, Neochem independently developed its own high-purity NF3 gas, and has a wide range of specialty gases in its portfolio, including 20% F2/N2, deuterium (D2), HCl, and Cl2 gas.

  • Supply stability

    Stable supply of products through independent plants, such as Yongyeon, Oksan, and Qúzhōu (China)

  • Exclusive original technology

    Electrolytic and high purity F2 technology gas-related anti-corrosion, systematization of safe manufacturing technologies, and cryogenic distillation and absorption technologies

  • High quality and
    wide range of products

    High quality and wide range of 5N(99.999%) products, such as NF3, 20% F2/N2, Cl2, HCl, and D2.

Strengths

  • Stable
    Supply System

  • Self-
    development

  • High Quality
    Products

NF3

The main raw materials of NF3 gas are hydrofluoric acid and ammonia.
We provide NF3 boasting a purity of more than 99.99%(5N) through EVHT response and cryogenic purification. NF3 gas is mainly used for cleaning CVD chambers and etching semiconductors during the semiconductor and display manufacturing processes.

  • Smart Factory-based NF3 production facilities for safety and quality enhancement

    The Neochem NF3 production process uses smart factory technology to detect anomalies in a facility and monitor the process and quality data in real-time for safe and stable operation and maintains the best quality without safety accidents.

    In recognition of its quality and supply stability, high-purity products produced with these advanced technologies are supplied to major semiconductor and display customers as well as international customers, including Taiwan, Japan, the United States, Europe, and Southeast Asia.

Strengths

Introducing the strengths of high quality NF3 with stable supply systems.

  • Stable
    Supply System

  • 99.999%
    High-purity

20% F2/N2

We produce high-purity F2 gas through electrolysis. By mixing F2 gas with high purity N2, we produce high purity 20% F2/N2 independently. 20% F2/N2 is used for cleaning the chamber of the semiconductor equipment, LP_CVD(Low-Pressure Chemical Vapor Deposition).

  • Manufacturing capacity of F2 mixed gases

    Various impurities generated during the production of F2 through the hydrofluoric acid response of electrolysis are purified with cryogenic distillation, producing 99.999% F2. We supply F2/N2 products in a uniform concentration of 20%, utilizing an automated blending facility.

Strengths

Introducing the strengths of high quality 20%F2/N2.

  • 99.999%
    High-purity

  • Uniformity in
    concentration

Other High-purity Gases

Neochem PU has independently developed deuterium gas (D2 gas) and high-purity gas (CI2 and HCI gas), and will continue to add a variety of products to our portfolio.

  • Cl2, HCl

    Participating in a national project in combination with a semiconductor client, we successfully localized specialty gases, which were once imported from Japan, and is now used for Si etching in domestic semiconductor processes.

  • D2

    By applying Neochem PU’s exclusive electrolysis technology based on D2O, a strategic material, we successfully localized it for the first time in Korea.
    D2 is used in the heat treatment process of the semiconductor wafer and optical cable to extend service life and enhance performance.

Strengths

Introducing the strengths of other domestic and high-quality high-purity specialty gases.

  • Import substitution
    and
    local manufacturing

  • Excellent Quality

Quality Certifications

  • ISO 9001 and 14001

    ISO 9001 and 14001

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